S8553 Silicon Photodiode Vacuum Ultraviolet VUV Monitoring Photodiode

The S8553 has sensitivity in the vacuum ultraviolet region. It is particularly suitable for excimer laser (ArF: 193 nm, KrF: 248 nm) monitoring.
Its design optimized for use in the VUV region improves the stability of VUV light irradiation sensitivity compared to previous products.

Features
- Improved reliability of excimer laser (ArF: 193 nm, KrF: 248 nm)
- Large photosensitive area: 18 × 18 mm
- Windowless package: 25.5 × 25.5 mm ceramic package

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