±1000sccm Micro Bridge Gas Mass Flow Meter Sensor AWM42300V

±1000sccm Micro-bridge Gas Mass Flow Sensor AWM42300V

Features:

Microbridge gas mass flow sensor utilizes thermal resistance wrapped in a thin film of silicon nitride. These resistors are suspended and form two Bridges over the etching cavity of the silicon wafer. The chip is placed in the best specification airflow channel to provide repeatable flow response. By etching the cavity under the flow sensing bridge, the heater and sensing resistor achieve efficient thermal isolation. The small size and thermal isolation function of the micro-bridge gas mass flow sensor achieve rapid response and high sensitivity to the airflow.

Wheatstone twin-bridge control airflow measurement - one provides closed-loop heater control, the other contains dual sensing elements. The heater circuit reduces output variation due to ambient temperature variation by providing an output proportional to the mass flow rate. This circuit maintains the temperature of the heater at a constant temperature difference above the ambient temperature (160 °C), which is measured by the thermal resistance on the chip. The output of the device is proportional to the supply voltage and also corresponds to the differential voltage of the Wheatstone bridge circuit.

Specifications:

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